Quantitative Phase Calibration Target

An important but sometimes assumed part of any measurement instrument is its correct and current calibration.  

Phasefocus developed the Quantitative Phase Calibration Target to ensure that its QPI products met a rigorous traceable standard of calibration.  Our peer reviewed paper explains our methodology and also the traceability measurements performed by the UK’s National Physics Laboratory - see the Optics Express Paper.

An overview can be found in our Application note.

Due to demand from the community we’ve made our traceable Quantitative Phase Calibration Target standards commercially available in a microscope slide format (unmounted 4mmx4mm versions are also available).


Contact us for more information



Example ptychography images showing a 127nm target


Graph of etch depths for Phasefocus' phase calibration target

                     Example depth profiles per grouping for each etch depth